CleanCell Cleanrooms
Cleanliness & Air Change Rate
Nano Clean CleanCell Cleanrooms are designed to satisfy the cleanliness requirements of ISO 14644 - Cleanrooms and Associated Controlled Environments.
Cleanliness & Air Change Rate
Cleanroom cleanliness is defined in ISO 14644-1:2015 Classification of Air Cleanliness by Particle Concentration in Table 1 - ISO Classes of Air Cleanliness by Particle Concentration:
| ISO Class | Maximum allowable concentration (particles/m³) for particles equal to or greater than the consider sizes | |||||
| =>0.1um | =>0.2um | =>0.3um | =>0.5um | =>1.0um | =>5.0um | |
| ISO Class 1 | 10 | |||||
| ISO Class 2 | 100 | 24 | 10 | |||
| ISO Class 3 | 1 000 | 237 | 102 | 35 | ||
| ISO Class 4 | 10 000 | 2 370 | 1 020 | 352 | 83 | |
| ISO Class 5 | 100 000 | 23 700 | 10 200 | 3 520 | 832 | |
| ISO Class 6 | 1 000 000 | 237 000 | 102 000 | 35 200 | 8 320 | 293 |
| ISO Class 7 | 352 000 | 83 200 | 2 930 | |||
| ISO Class 8 | 3 520 000 | 832 000 | 29 300 | |||
| ISO Class 9 | 35 200 000 | 8 320 000 | 293 000 | |||
Cleanroom occupancy state is defined by ISO 14644-1:2015 Classification of Air Cleanliness by Particle Concentration, as either:
- As Built
- At Rest
- Operational
The below table indicates the variables that practically impact Cleanroom cleanliness:
| Variables | As Built | At Rest | Operational |
| Cleanliness Class | Yes | Yes | Yes |
| Air Change Rate | Yes | Yes | Yes |
| Filter Efficiency | Yes | Yes | Yes |
| Differential Pressure | Yes | Yes | Yes |
| Process Contamination | Yes | Yes | |
| Personnel Contamination | Yes |
When defining the requirements of a Nano Clean CleanCell Cleanroom facility additional client specific parameters are taken into consideration, including:
| Variables | CleanCell 1.x | CleanCell 2.x | CleanCell 3.x | CleanCell 4.x |
| Cleanliness Class | Yes | Yes | Yes | Yes |
| Air Change Rate | Yes | Yes | Yes | Yes |
| Differential Pressure | Yes | Yes | Yes | Yes |
| Filter Efficiency | Yes | Yes | Yes | Yes |
| Process | Yes | Yes | Yes | Yes |
| Personnel | Yes | Yes | Yes | Yes |
| Ambient Conditions | Yes | Yes | ||
| Temperature | Yes | Yes | ||
| Relative Humidity | Yes | Yes | ||
| Process Heat Gain | Yes | Yes | ||
| Process Exhaust | Yes | Yes |
As a rule of thumb, for cleanliness we can consider the following air change rates as a starting point:
- ISO Class 9: >10 AC/H (non-unidirectional flow)
- ISO Class 8: >15 AC/H (non-unidirectional flow)
- ISO Class 7: >30 AC/H (non-unidirectional flow)
- ISO Class 6: >60 AC/H (non-unidirectional flow)
- ISO Class 5: >120 AC/H (non-unidirectional flow)
- ISO Class 5: 0.3m/s (unidirectional flow)
- ISO Class 4: 0.45m/s (unidirectional flow)
The project design review process will establish the appropriate air change rate to satisfy cleanliness and temperature control requirements, considering:
- Cleanliness classification
- Occupancy state
- Filtration efficiency
- Personnel contamination load
- Process contamination load
- Make-up air source
- Process Heatgain
- Extract losses
The CleanCell Cleanroom Range
Cleanroom Engineering
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