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CLEANROOM CASE STUDY

ACADEMIA | NANO TECHNOLOGY

Wafer Measurements

ISO 14644-1 | ISO Class 7

30m2

United Arab Emirates

Design | Supply | Install | Commission | Qualification Test

Client Brief

The introduction of new process tools for increased efficient dictated the requirement for an ISO Class 5 Cleanroom extension to be added to the existing Cleanroom suite to house the photolithography process for biotech manufacturing.

Nano Clean Solution

The new Cleanroom extension was designed to interface with the original suite to utilise common gowing facilities.

Being the cleanest area in the suite, the new ISO Class 5 area was designed to be +10Pa with respect to the adjacent ISO class 6 space.

Cleanrom Structure

  • To minimise installation time, the Cleanroom envelope was designed as a pre-engineered, self-supporting structure. Wall modules were formed from extruded aluminium profile with aluminium faced composite infill panels.
  • The existing parent building floor slab was screeded and anti-static sheet vinyl was laid. The vinyl flooring created a sel-form cove detail at the wall/floor interface, Butt joints in the sheet vinyl were thermally welded to create an essentially monolithic finish.
  • The ceiling was formed from walkable extruded aluminium tee grid suspended on drop-rods from the self-supporting clear span ties beams.
  • The ceiling grid housed FFM (fan HEPA filter modules) and infill tiles. The plenum lid was formed from foil face insulation board.

Mechanical Services

  • Air was supplied into the Cleanroom via ceiling mounted EC (electronically commutated) H14 FFM from the supply plenum. A proportion of air was recirculated via low-level return air grilles in the return air riser, back into the supply plenum, where it mixed with a portion of pre-filtered make-up air.
  • Cooling was provided via monobloc DX (direct expansion) cooling units to offset the process and make-up air heatgain,.

Electrical Services

  • Electrical power was provided from a new local DB (distribution board) to, teardrop light fittings, socket outlets, FFMs and monobloc DX units.
  • To protect the photolithography process from UV (ultra-violet) light, the door vision panels were fitted with amber UV control film and teardrop lighting was fitted with 500nm wavelength LEDs.

Conclusion

The pre-engineered structure ensured minimal disruption to production during installation.

By using addressable, energy efficient EC fans, airflow commissioning was simplified as all FFM were grouped. This enabled fine tuning the flow rate across the FFM group by common setpoint, rather than making individual FFM adjustments and multiple re-measurements.

The DX monobloc cooling provided a cost-effect means of cooling without the requirement of outdoor condensers and interconnecting refrigerant pipework.

CLEANROOMS & CONTROLLED ENVIRONMENTS